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żͷ½ȼ֮IJСǰչ¼ǿƽĽճƼĿǰһĹģѾǰɭЭȫơڳƷڿƵɭɰšҪĹҵ豸ڰͳίԱɢ1996һּڿƳ¼óĹ֯ӵ33Աй½ҪĿֹؼԪʧԱ֮
5262ʱؼѺҵ˾ŮʿŵĽʱŮʿءǴĿ۲߿ױΪ2710ķݻͼΪϲ119.82ƽ²119.82ƽĿԱŮʿҲǩˡءǴϹ顷͡ǴλʹȨתЭ顷ҪʱˢͬƷľƳɷֺͺвͬһܻijЩӦơƵˮֺ϶ŰһȻپƾ
ʵʵֽ̥ĸϸڿǺϷڴҺ͵ΥΥ⼸Ҳɷ빫Ұ֪Ȧɷһλػ֪ҵ״ԼԼĹ˺洢ҲӭԼĵһ̨̻ͬASML193nmʽڲ20-14nmյ3DNAND澧Բ7200Ԫһ̨